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Electron Swarm Parameters in SiH4/H2.
https://doi.org/10.15113/00011739
https://doi.org/10.15113/0001173961661f0b-c7aa-4ec1-a8d8-f80567655f0c
名前 / ファイル | ライセンス | アクション |
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erar-v49n1p69-78.pdf (745.8 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2008-03-05 | |||||
タイトル | ||||||
タイトル | Electron Swarm Parameters in SiH4/H2. | |||||
その他の言語のタイトル | ||||||
その他のタイトル | SiH4/H2. 中の電子フォームパラメータ | |||||
著者 |
SATO, Nobuyasu
× SATO, Nobuyasu× KAWASHIMA, Yoshiaki× TAGASHIRA, Hiroaki |
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著者別名 | ||||||
姓名 | 佐藤, 信安 | |||||
著者別名 | ||||||
姓名 | 川嶋, 良昭 | |||||
著者別名 | ||||||
姓名 | 田頭, 博昭 | |||||
著者(機関) | ||||||
Faculty of Education, Iwate University | ||||||
著者(機関) | ||||||
Faculty of Education, Iwate University | ||||||
著者(機関) | ||||||
Faculty of Electrical Engineering, Hokkaido University | ||||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Electron Swarm Parameters | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SiH4/H2 | |||||
Abstract | ||||||
内容記述タイプ | Other | |||||
内容記述 | A Monte Carlo technique is used for investigating electron swarm motion in the presence of elastic, excitation, ionization and attachment collisions through a SiH4 (20%) /H2 (80%) mixture under uniform field conditions. It has been shown that mixing a fraction of SiH4 into the hydrogen gas gives rise to drastic changes in the electron energy distribution function. This fact indicates that the swarm parameters in the mixture can not be reduced by combining each of the swarm parameters obtained individually in SiH4 and H2 assuming a linear relationship of the values to their partial pressure ratios. The swarm parameters for drift velocity (υd), mean energy (ε) , ionization (α/p) , excitation (αex/p) , dissociation (αd/p) and attachment (η/p) coefficients are evaluated directly by using the electron energy distribution functions obtained by the simulation in the E/p range of 10-2000 V/cmTorr. | |||||
出版者 | ||||||
出版者 | 岩手大学教育学部 | |||||
登録日 | ||||||
日付 | 2008-03-05 | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
ID登録 | ||||||
ID登録 | 10.15113/00011739 | |||||
ID登録タイプ | JaLC | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00017940 | |||||
書誌情報 |
岩手大学教育学部研究年報 = Annual report of the Faculty of Education, University of Iwate 巻 49, 号 1, p. 69-78, 発行日 1989-10-31 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0367-7370 |