さらに,ブレードのたわみを渦電流式変位センサでモニターし,たわみ量に基づいてブレードガイドの位置を積層型圧電素子で変化させるシステムを試作し,その制御方法について検討した.ブレードガイドの位置Z_Gと研削点でのブレードのたわみZ_Wと渦電流式変位センサからの出力Z_Sの間には一義的関係があることが実験から明らかになり,Z_GとZ_WとZ_Sの間にF(Z_G, Z_S, Z_W)=0なる関係があるとき,F(Z_G, Z_S, 0)=0が満足されるようにZ_Gを変化させれば切断軌道の偏位を抑制できることがわかった.
In the slicing processing with outer diameter blade, the blade deflection caused while processing has a large effect on the cutting accuracy. The blade deflection is caused by various factors such as an asymmetric wear of blade, imbalance of grinding performance of blade side faces and so on. It is difficult to exclude those factors completely. Therefore, the method of actively controlling the blade deflection with a blade guide was examined in this research. The slot of the blade guide was made by the blade itself which is used for slicing. At first, the effect of the fixed blade guide on the cutting accuracy was examined. In the experiment, the blade guide made of ceramics was set to the electroformed diamond blade of all blade type of 0.1mm in thickness, and AlTiC of 2mm in thickness was cut. As a result of it, it was clarified that the blade deflection can be suppressed with the blade guide. It is thought that the effect is brought by the dynamic pressure of grindig fluid caused in the wedge gaps between the blade sides and the guide faces.
Next, the above-mentioned experiment was modeled and the effect of the blade guide on the cutting accuracy was exmained theoretically. As a result of it, it was shown that the cutting deviation from the correct cutting path is suppressed to about 2/3 by using the blade guide.
In addition, a system which can monitor the blade deflection with an eddy current displacement sensor and can change the position of the blade guide with an piezoceramic stack was made for trial purposes and, moreover, the control method for it was examined. From some experiments it was found that there is a certain relationship of F(Z_G, Z_S, Z_W)=0 among the sensor output Z_S and the deviation of cutting path Z_W and the blade guide position Z_G. Therefore, it is thought that the cutting deviation can be suppressed if the blade guide position Z_G is changed so that the equation F(Z_G, Z_S, 0)=0 is satisfied.
その他のタイトル
ACTIVE CONTROL OF OD-BLADE BY DYNAMIC PRESSURE OF GRINDING FLUID
研削液の動圧を利用した外周刃ブレード刃先のアクティブ制御
kaken12650106.pdf
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