| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2013-01-28 |
| タイトル |
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|
タイトル |
Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges |
| キーワード |
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|
主題Scheme |
Other |
|
主題 |
glow discharges |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
plasma density |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Langmuir probes |
| キーワード |
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|
主題Scheme |
Other |
|
主題 |
plasma thermodynamics |
| キーワード |
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|
主題Scheme |
Other |
|
主題 |
heat transfer |
| キーワード |
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|
主題Scheme |
Other |
|
主題 |
thermal diffusivity |
| キーワード |
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主題Scheme |
Other |
|
主題 |
temperature measurement |
| 資源タイプ |
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|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
Takaki, K.
Kosek, D.
Fujiwara, T.
|
| 著者(機関) |
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|
値 |
Department of Electrical and Electronic Engineering, Iwate University |
| 登録日 |
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日付 |
2013-01-28 |
| 書誌情報 |
Applied Physics Letters
巻 80,
号 9,
p. 1526-1528,
発行日 2002-03-01
|
| ISSN |
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収録物識別子タイプ |
ISSN |
|
収録物識別子 |
0003-6951 |
| Abstract |
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内容記述タイプ |
Other |
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内容記述 |
This letter investigates the heat flux distribution on a substrate in capacitively coupled radio-frequency argon glow discharges. The heat fluxes were determined from substrate temperature distributions measured by a high-sensitivity laser interferometer method with a LiNbO3 birefringent substrate. This method is based on monitoring the variation of refractive index with temperature. The distribution was obtained by sliding the 1-cm long LiNbO3 substrate between two semicircular glass substrates placed on a disk electrode, 12 cm in diameter. The gap length was fixed at 2 cm and gas pressure was 100 mTorr. For the substrate placed on the powered electrode, the heat flux increases radically from the glow center to the radial electrode edge from 40 to 58 mW/cm2. The heat flux toward the grounded electrode increases radically from 15 to 21 mW/cm2. The total measured heat flux to the electrode is in good agreement with electrical power consumption determined from voltage and current measurements. The radial electron density profile in the discharge chamber was measured using a Langmuir probe. The results show that the maximum electron density observed at the electrode edge coincides with the maximum heat flux. |
| 出版者 |
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|
出版者 |
American Institute of Physics |
| 権利 |
|
|
権利情報 |
© 2002 American Institute of Physics |
| DOI |
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|
関連タイプ |
isIdenticalTo |
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|
識別子タイプ |
DOI |
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|
関連識別子 |
10.1063/1.1456551 |
| 著者版フラグ |
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|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
apl-v80i9p1526-1528.pdf (2.5 MB)
