{"created":"2023-05-15T12:06:50.986365+00:00","id":11766,"links":{},"metadata":{"_buckets":{"deposit":"4857eb97-2f26-4ac9-bc65-1806c3ecb7ff"},"_deposit":{"created_by":3,"id":"11766","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"11766"},"status":"published"},"_oai":{"id":"oai:iwate-u.repo.nii.ac.jp:00011766","sets":["1523:1528:1591:1625:1914"]},"author_link":["82333","82335","82330","82332","82331","82334"],"item_41_alternative_title_24":{"attribute_name":"その他の言語のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"窒素中, 過渡RF放電のコンピュータモデル : エネルギー方程式をともなう連続モデル"}]},"item_41_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1988-10-31","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"139","bibliographicPageStart":"127","bibliographicVolumeNumber":"48","bibliographic_titles":[{"bibliographic_title":"岩手大学教育学部研究年報 = Annual report of the Faculty of Education, University of Iwate"}]}]},"item_41_date_6":{"attribute_name":"登録日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2008-03-05"}]},"item_41_description_12":{"attribute_name":"Abstract","attribute_value_mlt":[{"subitem_description":"A continuum model is used for simulating the development of the transient RF discharge between parallel plates in nitrogen under a plasma processing condition. Non-equilibrium characteristics of the electron swarm are taken into account using ionization and excitation coefficients obtained by solving the electron energy equation simultaneously with the continuity equation for electrons. Significant characteristics of the transient RF discharge such as the temporal variations of the gap voltage, the discharge power and the discharge current are calcluated by numerically solving the continuity equations for electrons and ions using the F. C. T. SHASTA algorithm together with Poisson's equation and a RF circuit equation. The spatio-temporal evolutions of the electron and ion densities, the photon emission of the 2nd positive band and the space charge field are also calculated. The validity of the present model is discussed by comparing these calculated data with experimental observations and with data obtained by a Monte Carlo technique.","subitem_description_type":"Other"}]},"item_41_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{}],"names":[{"name":"佐藤, 信安"}]},{"nameIdentifiers":[{}],"names":[{"name":"上林, 知紀"}]},{"nameIdentifiers":[{}],"names":[{"name":"田頭, 博昭"}]}]},"item_41_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.15113/00011760","subitem_identifier_reg_type":"JaLC"}]},"item_41_publisher_14":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"岩手大学教育学部"}]},"item_41_source_id_25":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AN00017940","subitem_source_identifier_type":"NCID"}]},"item_41_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0367-7370","subitem_source_identifier_type":"ISSN"}]},"item_41_text_4":{"attribute_name":"著者(機関)","attribute_value_mlt":[{"subitem_text_value":"Faculty of Education, Iwate University"},{"subitem_text_value":"Faculty of Engineering, Hokkaido University"},{"subitem_text_value":"Faculty of Engineering, Hokkaido University"}]},"item_41_version_type_27":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"SATO, Nobuyasu"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"KAMIBAYASHI, Tomonori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"TAGASHIRA, Hiroaki"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-11-14"}],"displaytype":"detail","filename":"erar-v48n1p127-139.pdf","filesize":[{"value":"618.5 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"erar-v48n1p127-139.pdf","url":"https://iwate-u.repo.nii.ac.jp/record/11766/files/erar-v48n1p127-139.pdf"},"version_id":"a34e73ea-5465-4bdd-b860-d40c61e31bed"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Computer Modeling","subitem_subject_scheme":"Other"},{"subitem_subject":"Transient RF Discharge","subitem_subject_scheme":"Other"},{"subitem_subject":"Nitrogen","subitem_subject_scheme":"Other"},{"subitem_subject":"Continuum Model","subitem_subject_scheme":"Other"},{"subitem_subject":"Energy Equation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation"}]},"item_type_id":"41","owner":"3","path":["1914"],"pubdate":{"attribute_name":"公開日","attribute_value":"2008-03-05"},"publish_date":"2008-03-05","publish_status":"0","recid":"11766","relation_version_is_last":true,"title":["Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T15:07:14.833105+00:00"}