{"created":"2023-05-15T12:05:12.432285+00:00","id":9826,"links":{},"metadata":{"_buckets":{"deposit":"35a136c3-beb3-4137-93e1-6b3f4413a6d7"},"_deposit":{"created_by":3,"id":"9826","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"9826"},"status":"published"},"_oai":{"id":"oai:iwate-u.repo.nii.ac.jp:00009826","sets":["1515:1519"]},"author_link":["60994","60995","60997","60999","60998","60996"],"item_16_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1999-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"4","bibliographicPageEnd":"532","bibliographicPageStart":"531","bibliographicVolumeNumber":"119","bibliographic_titles":[{"bibliographic_title":"電気学会論文誌. A, 基礎・材料・共通部門誌"}]}]},"item_16_date_6":{"attribute_name":"登録日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-10-16"}]},"item_16_description_12":{"attribute_name":"Abstract","attribute_value_mlt":[{"subitem_description":"1989年にウイスコンシン大学のコンラッド博士により\n提案されたPSII(Plasma Source Ion Implantation)は,三次元形状物にもイオン注入が可能なことから,多くの機関で研究開発が試みられている(1)-(3)。PSIIには大容積・高密度プラズマが必要となる。コンデンサに接続したギャップなどで起こるパルスグロー放電では,短時間ではあるが大容積のプラズマが発生するため,イオンソースとしての応用が期待されている(3)、(4)。パルスグロー放電に関する報告は,過渡グロー放電を対象に,電流密度が正規グローの理論値とほぼ一致するなどが報告されている(5)-(8)。しかしこれらの放電電流は数Aから数十Aオーダと小さい。イオンソースとして利用するためには,プラズマの更なる高密度化が望まれる。本研究は,放電回路を同軸形状として回路インダクタンスを減らし,かつ回路抵抗を小さくすることで,パルスグロー放電を異常グロー領域で生成した。ここでは,その大電流パルスグロー放電の特性について述べる。","subitem_description_type":"Other"}]},"item_16_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"60997","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Takaki, Koichi"}]},{"nameIdentifiers":[{"nameIdentifier":"60998","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kitamura, Daisuke"}]},{"nameIdentifiers":[{"nameIdentifier":"60999","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Fujiwara, Tamiya"}]}]},"item_16_publisher_14":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"電気学会"}]},"item_16_rights_18":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright© 電気学会"}]},"item_16_rights_19":{"attribute_name":"権利URI","attribute_value_mlt":[{"subitem_rights":"http://www.iee.or.jp/"}]},"item_16_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0385-4205","subitem_source_identifier_type":"ISSN"}]},"item_16_text_4":{"attribute_name":"著者(機関)","attribute_value_mlt":[{"subitem_text_value":"岩手大学"}]},"item_16_version_type_27":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"高木, 浩一"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"北村, 大介"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"藤原, 民也"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-11-14"}],"displaytype":"detail","filename":"tieeja-v119n4p531-532.pdf","filesize":[{"value":"865.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"tieeja-v119n4p531-532.pdf","url":"https://iwate-u.repo.nii.ac.jp/record/9826/files/tieeja-v119n4p531-532.pdf"},"version_id":"d30458e4-3a56-4108-a09f-bca01e628251"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"過渡グロー放電","subitem_subject_scheme":"Other"},{"subitem_subject":"異常グロー放電","subitem_subject_scheme":"Other"},{"subitem_subject":"プラズマ","subitem_subject_scheme":"Other"},{"subitem_subject":"グロー放電","subitem_subject_scheme":"Other"},{"subitem_subject":"パルスパワー","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"パルスグロー放電を用いた大容量高密度プラズマの生成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"パルスグロー放電を用いた大容量高密度プラズマの生成"}]},"item_type_id":"16","owner":"3","path":["1519"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-10-16"},"publish_date":"2009-10-16","publish_status":"0","recid":"9826","relation_version_is_last":true,"title":["パルスグロー放電を用いた大容量高密度プラズマの生成"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-16T11:55:44.044347+00:00"}