| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2011-01-19 |
| タイトル |
|
|
タイトル |
Magnetic-field-induced enhancement of ion beam energy in a magnetically expanding plasma using permanent magnets |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
Takahashi, Kazunori
Shida, Yutaka
Fujiwara, Tamiya
|
| 著者(機関) |
|
|
値 |
Department of Electrical and Electronic Engineering, Iwate University |
| 登録日 |
|
|
日付 |
2011-01-19 |
| 書誌情報 |
Plasma Sources Science and Technology
巻 19,
号 12,
p. 025004,
発行日 2010-02-11
|
| ISSN |
|
|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
0963-0252 |
| Abstract |
|
|
内容記述タイプ |
Other |
|
内容記述 |
Ion energy distribution functions (IEDFs) near a source exit of a magnetically expanding argon plasma using only permanent magnets (PMs) are measured by a combination of a retarding field energy analyzer and a pulsed probe method for three types of magnetic-field configurations and various operating gas pressures, where the magnetic-field strength in the source tube is increased up to 270 G by adding the number of the PM layers. The 13.56 MHz rf power for plasma production is maintained at 250 W. The IEDFs show the existence of an accelerated group of ions. It is found that the energy of the accelerated ions increases when the magnetic-field strength is increased, but saturates at seven times the electron temperature at argon pressures of 0.6–1.6 mTorr. Our results show that the maximum velocity of the accelerated ions is found to be 14 km s_−1 with a Mach number of 3.8. |
| 出版者 |
|
|
出版者 |
IOP Publishing |
| 権利 |
|
|
権利情報 |
This is an author-created, un-copyedited version of an article accepted for publication in Plasma Sources Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0963-0252/19/2/025004. |
| DOI |
|
|
関連タイプ |
isVersionOf |
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
10.1088/0963-0252/19/2/025004 |
| 著者版フラグ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
psst-v19n2p025004.pdf (213.5 kB)
