| アイテムタイプ |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2011-01-19 |
| タイトル |
|
|
タイトル |
Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
Takahashi, Kazunori
Itoh, Yuki
Fujiwara, Tamiya
|
| 著者(機関) |
|
|
値 |
Department of Electrical Engineering and Computer Science, Iwate University |
| 登録日 |
|
|
日付 |
2011-01-19 |
| 書誌情報 |
Journal of Physics D: Applied Physics
巻 44,
号 1,
p. 015204,
発行日 2010-12-09
|
| ISSN |
|
|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
0022-3727 |
| Abstract |
|
|
内容記述タイプ |
Other |
|
内容記述 |
A 6.6 cm-inner-diameter permanent-magnets-expanding plasma source is connected to a large-volume diffusion chamber of about 76 cm diameter and 100 cm length, and is operated over a range of 20–300 mPa argon gas pressures. An rf power of 13.56 MHz for plasma production is maintained at 200 W and an expanding magnetic field of about 200 G in the source is provided by permanent magnet arrays. A potential drop of a few tens of volts is observed; a supersonic ion beam with energy corresponding to the potential drop is detected in the diffusion chamber. Radial investigation of the ion beam in the diffusion chamber indicates a detachment of the ion beam from the expanding magnetic field lines provided by the permanent magnets, at about several centimetres downstream of the source exit. |
| 出版者 |
|
|
出版者 |
IOP Publishing |
| 権利 |
|
|
権利情報 |
This is an author-created, un-copyedited version of an article accepted for publication in Journal of Physics D: Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher authenticated version is available online at 10.1088/0022-3727/44/1/015204. |
| DOI |
|
|
関連タイプ |
isVersionOf |
|
|
識別子タイプ |
DOI |
|
|
関連識別子 |
10.1088/0022-3727/44/1/015204 |
| 著者版フラグ |
|
|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
jpdap-v44n1p015204.pdf (1.0 MB)
