| Item type |
紀要論文 / Departmental Bulletin Paper(1) |
| 公開日 |
2008-03-05 |
| タイトル |
|
|
タイトル |
Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation |
| その他の言語のタイトル |
|
|
その他のタイトル |
窒素中, 過渡RF放電のコンピュータモデル : エネルギー方程式をともなう連続モデル |
| 著者 |
SATO, Nobuyasu
KAMIBAYASHI, Tomonori
TAGASHIRA, Hiroaki
|
| 著者別名 |
|
|
|
姓名 |
佐藤, 信安 |
| 著者別名 |
|
|
|
姓名 |
上林, 知紀 |
| 著者別名 |
|
|
|
姓名 |
田頭, 博昭 |
| 著者(機関) |
|
|
|
Faculty of Education, Iwate University |
| 著者(機関) |
|
|
|
Faculty of Engineering, Hokkaido University |
| 著者(機関) |
|
|
|
Faculty of Engineering, Hokkaido University |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Computer Modeling |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Transient RF Discharge |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Nitrogen |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Continuum Model |
| キーワード |
|
|
主題Scheme |
Other |
|
主題 |
Energy Equation |
| Abstract |
|
|
内容記述タイプ |
Other |
|
内容記述 |
A continuum model is used for simulating the development of the transient RF discharge between parallel plates in nitrogen under a plasma processing condition. Non-equilibrium characteristics of the electron swarm are taken into account using ionization and excitation coefficients obtained by solving the electron energy equation simultaneously with the continuity equation for electrons. Significant characteristics of the transient RF discharge such as the temporal variations of the gap voltage, the discharge power and the discharge current are calcluated by numerically solving the continuity equations for electrons and ions using the F. C. T. SHASTA algorithm together with Poisson's equation and a RF circuit equation. The spatio-temporal evolutions of the electron and ion densities, the photon emission of the 2nd positive band and the space charge field are also calculated. The validity of the present model is discussed by comparing these calculated data with experimental observations and with data obtained by a Monte Carlo technique. |
| 出版者 |
|
|
出版者 |
岩手大学教育学部 |
| 登録日 |
|
|
日付 |
2008-03-05 |
| 言語 |
|
|
言語 |
eng |
| 資源タイプ |
|
|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
departmental bulletin paper |
| 著者版フラグ |
|
|
出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| ID登録 |
|
|
ID登録 |
10.15113/00011760 |
|
ID登録タイプ |
JaLC |
| NCID |
|
|
収録物識別子タイプ |
NCID |
|
収録物識別子 |
AN00017940 |
| 書誌情報 |
岩手大学教育学部研究年報 = Annual report of the Faculty of Education, University of Iwate
巻 48,
号 1,
p. 127-139,
発行日 1988-10-31
|
| ISSN |
|
|
収録物識別子タイプ |
ISSN |
|
収録物識別子 |
0367-7370 |
erar-v48n1p127-139.pdf (618.5 kB)
